研究室紹介
Inorganic materials × Deep UV Laser process
Department of Electronics, Faculty of Information Science and Electrical Engineering
Department of Electrical and Electronic Engineering, Graduate School of Information Science and Electrical Engineering
Department of Electrical Engineering and Computer Science, School of Engineering
The electronic devices that you hold in your hands today use not only traditional materials (e.g., silicon for semiconductors), but also many newly discovered materials and materials that exhibit functions previously unknown to you. Oxide materials like glass are used in smartphones and tablet PCs as semiconductors for transistors instead of silicon. Our research is aimed at finding new inorganic materials or adding new functions and properties to already known inorganic materials. As a tool for this research, we use excimer lasers, which generate powerful ultraviolet beams, to synthesize new materials and process them to produce new functions. We are working daily to ensure that these new materials and functions will be applied to the next generation devices.
Staff
Prof. Hisato YABUTA
The Main Research Topics
- A new semiconductor device fabrication process using deep-UV pulsed lasers.
- Investigation of fundamental properties and device applications of functional inorganic materials (oxide semiconductors, dielectrics, etc.).
