Department of Advanced Energy Science and Engineering , Faculty of Engineering Sciences
Department of Interdisciplinary Engineering Sciences, Interdisciplinary Graduate school of Engineering Sciences
Department of Interdisciplinary Engineering, School of Engineering
We carry out research on processes and evaluation elemental-technologies for device fabrications, including sensing materials, ranging from materials growth in thin film to evaluations and device fabrications. Physical vapor deposition methods such as sputtering, laser ablation, and coaxial arc plasma deposition are mainly employed for depositing thin films, and we are actively developing methods that make full use of lasers as new elemental technologies for device creation.
Prof. Tsuyoshi Yoshitake