研究室紹介
Process Design Engineering
Research Institute for Applied Mechanics
Department of Interdisciplinary Engineering Sciences, Interdisciplinary Graduate school of Engineering Sciences
Department of Interdisciplinary Engineering, School of Engineering
Process Design Engineering Laboratory is dedicated to material development for renewable energy and power conversion systems. III-Nitride semiconductors, such as AlN, GaN, InN and their alloys, are candidate materials for those systems according to their superior material properties. Our laboratory is supporting the device-grade material development from theoretical point of view.
Staff
Prof. Yoshihiro Kangawa
Asst.Prof. Akira Kusaba
The Main Research Topics
- Development of ab initio-based approach: prediction of surface phase diagram
- Investigation of impurity incorporation mechanism during semiconductor epitaxy (process informatics)
- Process design of III nitride semiconductors
