研究室紹介
Precision Machining
Department of Mechanical Engineering, Faculty of Engineering
Department of Mechanical Engineering, Graduate School of Engineering
Department of Mechanical Engineering, School of Engineering
Development of the state-of-the-art manufacturing processes and measuring techniques for the green devices and machine elements
Staff
Prof. Syuhei Kurokawa
Assoc.Prof. Terutake Hayashi
Asst.Prof. Takao Sajima
The Main Research Topics
- Ultra-Precision Manufacturing Technology - CMP(Chemical Mechanical Polishing) for energy saving device materialsr, Ultra-precision manufacturing and performance evaluation
- Ultra-Precision Measuring Technology - Optical measurement & evaluation, R&D of 3D measurement and testing method
- R&D of Creative Manufacturing Technique and Machines - Conformal coating and Electro spray application for MEMS, Low power laser processing with surface excitation
